Ivan G. Ivanov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivan G. Ivanov returned 4 record(s).

Number	Title
1	The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films
2	In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
3	Atomic layer deposition of InN using trimethylindium and ammonia plasma
4	Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition