Inductively coupled plasma sources from Plasma ALD, LLC.


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Frieder Koch Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Frieder Koch returned 2 record(s).

NumberTitle
1Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
2Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates