Do-Kywn Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Do-Kywn Kim returned 2 record(s).

Number	Title
1	Performance of AlGaN/GaN MISHFET using dual-purpose thin Al₂O₃ layer for surface protection and gate insulator
2	Device Performances Related to Gate Leakage Current in Al₂O₃/AlGaN/GaN MISHFETs