Inductively coupled plasma sources from Plasma ALD, LLC.


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Joohyun Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joohyun Park returned 2 record(s).

NumberTitle
1The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
2Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime