Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Min-Kyu Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Min-Kyu Kim returned 3 record(s).

NumberTitle
1Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
2Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
3Flexible insulator of hollow SiO2 spheres and polyimide hybrid for flexible OLED