Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Rajesh Odedra Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rajesh Odedra returned 1 record(s).

NumberTitle
1Gadolinium nitride films deposited using a PEALD based process