Ming-Jie Zhao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ming-Jie Zhao returned 2 record(s).

Number	Title
1	Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy
2	Influence of plasma power on deposition mechanism and structural properties of MoO_x thin films by plasma enhanced atomic layer deposition