Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Young Hun Yu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Young Hun Yu returned 1 record(s).

NumberTitle
1Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition