Inductively coupled plasma sources from Plasma ALD, LLC.


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Aniruddh Shekhawat Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Aniruddh Shekhawat returned 1 record(s).

NumberTitle
1Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films