Maxine Darnon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maxine Darnon returned 3 record(s).

Number	Title
1	Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH₃F/O₂/He plasmas
2	Via sidewall insulation for through cell via contacts
3	Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach