L. Alrifai Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by L. Alrifai returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Sub-10-nm ferroelectric Gd-doped HfO2 layers |
Your search for plasma enhanced atomic layer deposition publications authored by L. Alrifai returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Sub-10-nm ferroelectric Gd-doped HfO2 layers |