Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Seung-Hee Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung-Hee Lee returned 1 record(s).

NumberTitle
1Oxide Vertical TFTs for the Application to the Ultra High Resolution Display