Inductively coupled plasma sources from Plasma ALD, LLC.


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Sang-Kyung Choi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Kyung Choi returned 2 record(s).

NumberTitle
1Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization
2Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material