Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Yimao Wan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yimao Wan returned 2 record(s).

NumberTitle
1Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
2Simple silicon solar cells featuring an a-Si:H enhanced rear MIS contact