Nicholas A. Strnad Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nicholas A. Strnad returned 2 record(s).

Number	Title
1	Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
2	Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes