Inductively coupled plasma sources from Plasma ALD, LLC.


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Nicholas A. Strnad Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nicholas A. Strnad returned 2 record(s).

NumberTitle
1Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
2Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride