Inductively coupled plasma sources from Plasma ALD, LLC.


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Won-Jun Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Won-Jun Lee returned 3 record(s).

NumberTitle
1Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
2Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
3Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel