Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

A. Ma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Ma returned 2 record(s).

NumberTitle
1Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
2Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices