J. Hinz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Hinz returned 2 record(s).

Number	Title
1	Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
2	Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application