Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Gregg H. Jessen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gregg H. Jessen returned 1 record(s).

NumberTitle
1High pulsed current density β-Ga2O3 MOSFETs verified by an analytical model corrected for interface charge