Inductively coupled plasma sources from Plasma ALD, LLC.


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P. Ong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Ong returned 1 record(s).

NumberTitle
1Electrical Characteristics of p-Type Bulk Si Fin Field-Effect Transistor Using Solid-Source Doping With 1-nm Phosphosilicate Glass