Toshinori Imai Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Toshinori Imai returned 2 record(s).
| Number | Title |
|---|---|
| 1 | A Silicon Nitride MIM Capacitor for Analog/Mixed-Signal Integrated Circuit using Manufacturable Atomic Layer Deposition Equipment |
| 2 | Atomic layer epitaxy of germanium |