Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Shinji Hoshino Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shinji Hoshino returned 1 record(s).

NumberTitle
1Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon