Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Manca Logar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Manca Logar returned 2 record(s).

NumberTitle
1Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
2Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition