Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Roger Bischofberger Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Roger Bischofberger returned 1 record(s).

NumberTitle
1High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds