Hyo Sik Chang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyo Sik Chang returned 2 record(s).

Number	Title
1	Plasma nitridation of atomic layer deposition (ALD) Al₂O₃ by NH₃ in plasma-enhanced chemical vapor deposition (PECVD) for silicon solar cell
2	Improvement on the Passivation Effect of Al₂O₃ Layer Deposited by PA-ALD in Crystalline Silicon Solar Cells