Wei-Chung Kao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wei-Chung Kao returned 4 record(s).

Number	Title
1	Sub-nanometer heating depth of atomic layer annealing
2	Sub-7-nm textured ZrO₂ with giant ferroelectricity
3	AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
4	Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing