Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Michael J. Pellin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael J. Pellin returned 1 record(s).

NumberTitle
1Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide