Sergei Rouvimov Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sergei Rouvimov returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions |