Kazunori Kurishima Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kazunori Kurishima returned 3 record(s).

Number	Title
1	Improvement of smooth surface of RuO₂ bottom electrode on Al₂O₃ buffer layer and characteristics of RuO₂/TiO₂/Al₂O₃/TiO₂/RuO₂ capacitors
2	Influence of Al₂O₃ layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
3	Influence of Al₂O₃ Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor