Inductively coupled plasma sources from Plasma ALD, LLC.


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T. Vanzieleghem Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by T. Vanzieleghem returned 1 record(s).

NumberTitle
1Lytic enzymes as selectivity means for label-free, microfluidic and impedimetric detection of whole-cell bacteria using ALD-Al2O3 passivated microelectrodes