Yu-Wei Chang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Wei Chang returned 3 record(s).

Number	Title
1	Er coordination in Y₂O₃ thin films studied by extended x-ray absorption fine structure
2	Electrical and physical characteristics of high-k gated MOSFETs with in-situ H₂O and O₂ plasma formed interfacial layer
3	Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides