Inductively coupled plasma sources from Plasma ALD, LLC.


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Julien Gatineau Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Julien Gatineau returned 3 record(s).

NumberTitle
1Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
2Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
3Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor