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W. S. Kang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by W. S. Kang returned 2 record(s).

NumberTitle
1Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
2Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition