Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Seokhwi Song Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seokhwi Song returned 2 record(s).

NumberTitle
1Carbon content control of silicon oxycarbide film with methane containing plasma
2Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma