Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

J. H. Edgar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. H. Edgar returned 1 record(s).

NumberTitle
1Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor