Myoung-Jin Kang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Myoung-Jin Kang returned 4 record(s).

Number	Title
1	Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
2	Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
3	Effects of Recessed-Gate Structure on AlGaN/GaN-on-SiC MIS-HEMTs with Thin AlOxNy MIS Gate
4	High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure