Inductively coupled plasma sources from Plasma ALD, LLC.


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Chang Young Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chang Young Kim returned 3 record(s).

NumberTitle
1Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
2Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
3Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition