Inductively coupled plasma sources from Plasma ALD, LLC.


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Lukas Hoffmann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lukas Hoffmann returned 2 record(s).

NumberTitle
1Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
2Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition