Sangdeok Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sangdeok Kim returned 2 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of SnO₂ thin films using SnCl₄ and O₂ plasma
2	Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH₃ Plasma as a Reactant