Sangdeok Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sangdeok Kim returned 2 record(s).

Number	Title
1	Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
2	Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma