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Jialing Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jialing Yang returned 2 record(s).

NumberTitle
1Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
2Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride