Daniel V. Greenslit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daniel V. Greenslit returned 5 record(s).

Number	Title
1	Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers
2	Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications
3	Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
4	Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers
5	Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications