Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Chen Song Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chen Song returned 1 record(s).

NumberTitle
1HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition