Ufuk Kılıç Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ufuk Kılıç returned 2 record(s).

Number	Title
1	Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
2	Critical-point model dielectric function analysis of WO₃ thin films deposited by atomic layer deposition techniques