Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Savvas G. Hatzikiriakos Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Savvas G. Hatzikiriakos returned 1 record(s).

NumberTitle
1Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films