Seung-Youl Kang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung-Youl Kang returned 2 record(s).

Number	Title
1	Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
2	All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process