Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Seung-Youl Kang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung-Youl Kang returned 2 record(s).

NumberTitle
1Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
2All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process