Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Diana Garcia-Alonso Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Diana Garcia-Alonso returned 3 record(s).

NumberTitle
1Room-Temperature Atomic Layer Deposition of Platinum
2Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
3Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells