Inductively coupled plasma sources from Plasma ALD, LLC.


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Niru Kumari Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Niru Kumari returned 2 record(s).

NumberTitle
1Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
2Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction