Inductively coupled plasma sources from Plasma ALD, LLC.


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René H. J. Vervuurt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by René H. J. Vervuurt returned 2 record(s).

NumberTitle
1Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
2Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation