Inductively coupled plasma sources from Plasma ALD, LLC.


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Samia Belahcen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Samia Belahcen returned 2 record(s).

NumberTitle
1Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO2
2Topographically selective deposition