Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Phillip Jenkins Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Phillip Jenkins returned 2 record(s).

NumberTitle
1Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
2Enhanced surface passivation of epitaxially grown emitters for high-efficiency ultrathin crystalline Si solar cells